Insights on Capacitive Interdigitated Electrodes Coated with MOF Thin Films: Humidity and VOCs Sensing as a Case Study

Sensors

Christos Sapsanis¹  Hesham Omran¹  Valeriya Chernikova²  Osama Shekhah²  Youssef Belmabkhout²  Ulrich Buttner¹  Mohamed Eddaoudi²  Khaled N. Salama¹ 

[1] Sensors Lab, Electrical Engineering Program, King Abdullah University of Science and Technology (KAUST), Thuwal 23955-6900, Saudi Arabia; E-Mails:;Advanced Membranes & Porous Materials Center, Chemical Science Program, King Abdullah University of Science and Technology (KAUST), Thuwal 23955-6900, Saudi Arabia; E-Mails:

关键词: metal organic frameworks (MOFs);    thin films;    porous materials;    interdigitated electrodes (IDEs);    gas sensor test setup;    humidity sensors;    capacitive sensors;    volatile organic compounds (VOCs);   

DOI  :  10.3390/s150818153

来源: mdpi

【 摘 要 】

A prototypical metal-organic framework (MOF), a 2D periodic porous structure based on the assembly of copper ions and benzene dicarboxylate (bdc) ligands (Cu(bdc)·xH₂O), was grown successfully as a thin film on interdigitated electrodes (IDEs). IDEs have been used for achieving planar CMOS-compatible low-cost capacitive sensing structures for the detection of humidity and volatile organic compounds (VOCs). Accordingly, the resultant IDEs coated with the Cu(bdc)·xH₂O thin film was evaluated, for the first time, as a capacitive sensor for gas sensing applications. A fully automated setup, using LabVIEW interfaces to experiment conduction and data acquisition, was developed in order to measure the associated gas sensing performance.

【 授权许可】

CC BY   
© 2015 by the authors; licensee MDPI, Basel, Switzerland.