Sensors | |
Capacitive Micromachined Ultrasonic Transducers (CMUTs) for Underwater Imaging Applications | |
Jinlong Song1  Chenyang Xue1  Changde He1  Rui Zhang1  Linfeng Mu1  Juan Cui1  Jing Miao1  Yuan Liu1  Wendong Zhang1  | |
[1] Key Laboratory of Instrumentation Science & Dynamic Measurement, Ministry of Education, North University of China, Taiyuan 030051, China; E-Mails: | |
关键词:
CMUT;
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DOI : 10.3390/s150923205 | |
来源: mdpi | |
【 摘 要 】
A capacitive micromachined ultrasonic transducer structure for use in underwater imaging is designed, fabricated and tested in this paper. In this structure, a silicon dioxide insulation layer is inserted between the top electrodes and the vibration membrane to prevent ohmic contact. The capacitance-voltage (
【 授权许可】
CC BY
© 2015 by the authors; licensee MDPI, Basel, Switzerland.
【 预 览 】
Files | Size | Format | View |
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RO202003190006302ZK.pdf | 1901KB | download |