Optimization of Surface Acoustic Wave-Based Rate Sensors

Sensors

Fangqian Xu²  Wen Wang¹  Xiuting Shao¹  Xinlu Liu¹  Yong Liang¹ 

[1] State Key Laboratory of Acoustics, Institute of Acoustics, Chinese Academy of Sciences, No. 21, BeiSiHuan West Road, Beijing 100190, China; E-Mails:;Zhejiang University of Media and Communications, 998 Xueyuan Street Higher Education Zone Xia Sha, Zhejiang 310018, China; E-Mail:

关键词: Coriolis force;    delay line-oscillator;    metallic dot array;    partial-wave analysis;    SAW rate sensor;   

DOI  :  10.3390/s151025761

来源: mdpi

【 摘 要 】

The optimization of an surface acoustic wave (SAW)-based rate sensor incorporating metallic dot arrays was performed by using the approach of partial-wave analysis in layered media. The optimal sensor chip designs, including the material choice of piezoelectric crystals and metallic dots, dot thickness, and sensor operation frequency were determined theoretically. The theoretical predictions were confirmed experimentally by using the developed SAW sensor composed of differential delay line-oscillators and a metallic dot array deposited along the acoustic wave propagation path of the SAW delay lines. A significant improvement in sensor sensitivity was achieved in the case of 128° YX LiNbO₃, and a thicker Au dot array, and low operation frequency were used to structure the sensor.

【 授权许可】

CC BY   
© 2015 by the authors; licensee MDPI, Basel, Switzerland.