Sensors | |
Fabrication of Capacitive Acoustic Resonators Combining 3D Printing and 2D Inkjet Printing Techniques | |
Rubaiyet Iftekharul Haque2  Erick Ogam3  Christophe Loussert1  Patrick Benaben2  Xavier Boddaert2  | |
[1] TAGSYS RFID, 13600 La Ciotat, France; E-Mail:;Centre Microélectronique de Provence (CMP), École Nationale Supérieure des Mines de Saint-Étienne, 13541 Gardanne, France; E-Mail:;Laboratoire de Mécanique et D’Acoustique UPR7051 CNRS, 31 Chemin Josep Aiguier, 13402 Marseille, France; E-Mail: | |
关键词: acoustic transducer; resonator; printed electronics; inkjet printing; 3D printing; | |
DOI : 10.3390/s151026018 | |
来源: mdpi | |
【 摘 要 】
A capacitive acoustic resonator developed by combining three-dimensional (3D) printing and two-dimensional (2D) printed electronics technique is described. During this work, a patterned bottom structure with rigid backplate and cavity is fabricated directly by a 3D printing method, and then a direct write inkjet printing technique has been employed to print a silver conductive layer. A novel approach has been used to fabricate a diaphragm for the acoustic sensor as well, where the conductive layer is inkjet-printed on a pre-stressed thin organic film. After assembly, the resulting structure contains an electrically conductive diaphragm positioned at a distance from a fixed bottom electrode separated by a spacer. Measurements confirm that the transducer acts as capacitor. The deflection of the diaphragm in response to the incident acoustic single was observed by a laser Doppler vibrometer and the corresponding change of capacitance has been calculated, which is then compared with the numerical result. Observation confirms that the device performs as a resonator and provides adequate sensitivity and selectivity at its resonance frequency.
【 授权许可】
CC BY
© 2015 by the authors; licensee MDPI, Basel, Switzerland.
【 预 览 】
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RO202003190004986ZK.pdf | 3489KB | download |