Fabrication of Capacitive Acoustic Resonators Combining 3D Printing and 2D Inkjet Printing Techniques

Sensors

Rubaiyet Iftekharul Haque²  Erick Ogam³  Christophe Loussert¹  Patrick Benaben²  Xavier Boddaert² 

[1] TAGSYS RFID, 13600 La Ciotat, France; E-Mail:;Centre Microélectronique de Provence (CMP), École Nationale Supérieure des Mines de Saint-Étienne, 13541 Gardanne, France; E-Mail:;Laboratoire de Mécanique et D’Acoustique UPR7051 CNRS, 31 Chemin Josep Aiguier, 13402 Marseille, France; E-Mail:

关键词: acoustic transducer;    resonator;    printed electronics;    inkjet printing;    3D printing;   

DOI  :  10.3390/s151026018

来源: mdpi

【 摘 要 】

A capacitive acoustic resonator developed by combining three-dimensional (3D) printing and two-dimensional (2D) printed electronics technique is described. During this work, a patterned bottom structure with rigid backplate and cavity is fabricated directly by a 3D printing method, and then a direct write inkjet printing technique has been employed to print a silver conductive layer. A novel approach has been used to fabricate a diaphragm for the acoustic sensor as well, where the conductive layer is inkjet-printed on a pre-stressed thin organic film. After assembly, the resulting structure contains an electrically conductive diaphragm positioned at a distance from a fixed bottom electrode separated by a spacer. Measurements confirm that the transducer acts as capacitor. The deflection of the diaphragm in response to the incident acoustic single was observed by a laser Doppler vibrometer and the corresponding change of capacitance has been calculated, which is then compared with the numerical result. Observation confirms that the device performs as a resonator and provides adequate sensitivity and selectivity at its resonance frequency.

【 授权许可】

CC BY   
© 2015 by the authors; licensee MDPI, Basel, Switzerland.