Ultra-Compact 100 × 100 μm2 Footprint Hybrid Device with Spin-Valve Nanosensors

Sensors

Diana C. Leitao¹  Paulo Coelho¹  Jerome Borme²  Simon Knudde¹  Susana Cardoso¹  Paulo P. Freitas¹ 

[1] INESC-MN - Instituto de Engenharia de Sistemas e Computadores - Microsistemas e Nanotecnologias and IN - Institute of Nanoscience and Nanotechnology, Rua Alves Redol 9, Lisboa 1000-029, Portugal;INL - International Iberian Nanotechnology Laboratory, Av. Mestre José Veiga, 4715 Braga, Portugal;

关键词: spin valves;    nanosensors;    flux guides;   

DOI  :  10.3390/s151229809

来源: mdpi

【 摘 要 】

Magnetic field mapping with micrometric spatial resolution and high sensitivity is a challenging application, and the technological solutions are usually based on large area devices integrating discrete magnetic flux guide elements. In this work we demonstrate a high performance hybrid device with improved field sensitivity levels and small footprint, consisting of a ultra-compact 2D design where nanometric spin valve sensors are inserted within the gap of thin-film magnetic flux concentrators. Pole-sensor distances down to 400 nm are demonstrated using nanofabrication techniques combined with an optimized liftoff process. These 100 × 100 μm pixel sensors can be integrated in modular devices for surface mapping without moving parts.

【 授权许可】

CC BY   
© 2015 by the authors; licensee MDPI, Basel, Switzerland.