Sensors | |
A Sensitivity Enhanced MWCNT/PDMS Tactile Sensor Using Micropillars and Low Energy Ar+ Ion Beam Treatment | |
Syed Azkar Ul Hasan1  Youngdo Jung1  Seonggi Kim1  Cho-Long Jung1  Sunjong Oh1  Junhee Kim1  Hyuneui Lim1  | |
[1] Department of Nature-Inspired Nano Convergence Systems, Korea Institute of Machinery and Materials, Daejeon 34103, Korea; | |
关键词: MWCNT/PDMS; piezoresistive tactile sensor; micropillar; ion beam treatment; curved pillar; directional detection; | |
DOI : 10.3390/s16010093 | |
来源: mdpi | |
【 摘 要 】
High sensitive flexible and wearable devices which can detect delicate touches have attracted considerable attentions from researchers for various promising applications. This research was aimed at enhancing the sensitivity of a MWCNT/PDMS piezoresistive tactile sensor through modification of its surface texture in the form of micropillars on MWCNT/PDMS film and subsequent low energy Ar+ ion beam treatment of the micropillars. The introduction of straight micropillars on the MWCNT/PDMS surface increased the sensitivity under gentle touch. Low energy ion beam treatment was performed to induce a stiff layer on the exposed surface of the micropillar structured MWCNT/PDMS film. The low energy ion bombardment stabilized the electrical properties of the MWCNT/PDMS surface and tuned the curvature of micropillars according to the treatment conditions. The straight micropillars which were treated by Ar+ ion with an incident angle of 0° demonstrated the enhanced sensitivity under normal pressure and the curved micropillars which were treated with Ar+ ion with an incident angle of 60° differentiated the direction of an applied shear pressure. The ion beam treatment on micropillar structured MWCNT/PDMS tactile sensors can thus be applied to reliable sensing under gentle touch with directional discrimination.
【 授权许可】
CC BY
© 2016 by the authors; licensee MDPI, Basel, Switzerland.
【 预 览 】
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RO202003190000525ZK.pdf | 2474KB | download |