Lead-Free Piezoelectric Diaphragm Biosensors Based on Micro-Machining Technology and Chemical Solution Deposition

Sensors

Xiaomeng Li¹  Xiaoqing Wu¹  Peng Shi¹  Zuo-Guang Ye¹ 

[1] Electronic Materials Research Laboratory, Key Laboratory of the Ministry of Education & International Center for Dielectric Research, Xi’an Jiaotong University, Xi’an 710049, China;

关键词: piezoelectric diaphragm biosensor;    lead-free;    chemical solution deposition;   

DOI  :  10.3390/s16010069

来源: mdpi

【 摘 要 】

In this paper, we present a new approach to the fabrication of integrated silicon-based piezoelectric diaphragm-type biosensors by using sodium potassium niobate-silver niobate (0.82KNN-0.18AN) composite lead-free thin film as the piezoelectric layer. The piezoelectric diaphragms were designed and fabricated by micro-machining technology and chemical solution deposition. The fabricated device was very sensitive to the mass changes caused by various targets attached on the surface of diaphragm. The measured mass sensitivity value was about 931 Hz/μg. Its good performance shows that the piezoelectric diaphragm biosensor can be used as a cost-effective platform for nucleic acid testing.

【 授权许可】

CC BY   
© 2016 by the authors; licensee MDPI, Basel, Switzerland.