Fabrication of multi-level 3-dimension microstructures by phase inversion process

Nano-Micro Letters

Y. Song¹ 

关键词: Microstructures;    Multi-level;    Fabrication;    Photolithography;    Phase inversion;    Sealing;   

DOI  :  10.5101/nml.v2i2.p95-100

来源: Open Access House of Science and Technology

【 摘 要 】

Oneprocessbasedonphaseinversionoffillersinmicrostructuresforthefabricationofmulti-levelthree-dimensional(3-D)microstructuresisdescribedusingSU-8,akindofepoxyphotoresist,asthemodelconstructingmaterials.Thisprocessisdepictedbyuseoftheroutinephotolithographytechniquetoconstructthetoplayerof3-Dmicrostructuresonthebottomlayerof3-Dmicrostructureslayerbylayer.Thisprocessmakesitpossibletofabricatemulti-level3-Dmicrostructureswithconnectorsatdesiredlocations,andtoseallongspanmicrostructures(e.g.veryshallowchannelswithdepthlessthan50μmandwidthmorethan300μm)withoutblockage.Inaddition,thisprocesscanprovideasealinglayerbythesolidificationofaliquidpolymerlayer,whichcanbeasstrongasthebulkconstructingmaterialsformicrostructuresduetoacompletecontactandcross-linkingbetweenthesealinglayerandthepatternedlayers.Thehydrodynamictestingindicatesthatthiskindofsealingandinterconnectioncanendureastaticpressureofmorethan10MPaovernightandahydrodynamicpressuredropofabout5.3MPaformorethan8hoursbypumpingthetetrahydrofuransolutionthrougha60μmwidemicro-channels.

【 授权许可】

Unknown