Miniaturized Wide-Range Field-Emission Vacuum Gauge

Nanomaterials and Nanotechnology

Anna Maria Lausch¹  Alois Lugstein¹  Amra Avdić¹  Emmerich Bertagnolli¹ 

关键词: Nanoscale vacuum gauge;    field emission;   

DOI  :  10.5772/59483

来源: InTech

【 摘 要 】

Miniaturized vacuum gauges (MVGs) for the measurement range 5.7times10−7 to 1.1times10−2 mbar were fabricated in a self-aligned approach using focused ion beam (FIB) nanoma-chining and reactive ion etching (RIE). The MVG consists of two properly insulated electrodes integrated on top of an atomic force microscopy (AFM) tip, forming a coaxial embodiment. The special design enables us to vary the cathode-anode separation and the turn-on voltage changes accordingly. The experiments show that the MVGs operate at low bias potential and demonstrate very good I-P dependence over a wide pressure range.

【 授权许可】

Unknown