Acoustical Science and Technology | |
High-frequency stability oscillator for surface acoustic wave gas sensor | |
Yong Pan1  Minghua Liu2  Shitang He2  Shunzhou Li2  Wen Wang2  | |
[1] Research Institute of Chemical Defense;Institute of Acoustics, Chinese Academy of Sciences | |
关键词: Delay line; Frequency stability; Gas sensor; Oscillator; Surface acoustic wave; Sensitivity; | |
DOI : 10.1250/ast.30.7 | |
学科分类:声学和超声波 | |
来源: Acoustical Society of Japan | |
【 摘 要 】
References(7)Cited-By(1)We present a 300 MHz surface acoustic wave (SAW) oscillator for gas sensor application. As the oscillator element, SAW delay lines on an ST-X quartz substrate with low insertion loss and single-mode-selection capability were developed. And they were structured by Electrode Width Control Single Phase Unidirectional Transducer (EWC/SPUDT) configuration and comb transducer. The coupling of modes (COM) model was used to predict device performance prior to fabrication. The measured frequency response S12 showed a good agreement with simulated results; a low insertion loss of less than 9 dB and a linear phase in the 3 dB bandwidth were observed. The experimental results show that the baseline noise of the fabricated oscillators was typically up to ∼0.7×10−7 in a laboratory environment with temperature control. The oscillator was successfully applied to a gas sensor coated with fluoroalcoholpolysiloxane (SXFA) as the sensor material for O-isopropyl methyphosphonofluoridate (GB) detection, and a superior threshold detection limit was obtained (<<0.4 mg/m3).
【 授权许可】
Unknown
【 预 览 】
Files | Size | Format | View |
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RO201912080715686ZK.pdf | 194KB | download |