Principle and application of ball surface acoustic wave (SAW) sensor

Acoustical Science and Technology

Kazushi Yamanaka⁴  Takeshi Fukiura¹  Noritaka Nakaso³  Dongyoun Sim² 

[1] Yamatake Co.;Ball Semiconductor Inc.;Toppan Printing Co.;Tohoku University

关键词: Surface acoustic wave;    Bearing ball;    Gas sensor;    Hydrogen;    Naturally collimated beam;    Multiple roundtrip;   

DOI  :  10.1250/ast.30.2

学科分类：声学和超声波

来源: Acoustical Society of Japan

【 摘 要 】

References(17)Cited-By(8)Detection of hydrogen gas is a crucial task for establishing safety and reliability of fuel cells, a key technology for the environment and our society. However, hydrogen is difficult to detect and various hydrogen sensors have many drawbacks. Here we report a novel hydrogen gas sensor, the ball surface acoustic wave (SAW) sensor, using Pd or PdNi sensitive film. The ball SAW sensor is based on a novel phenomenon, diffraction-free propagation of collimated beam along an equator of sphere. The resultant ultra-multiple roundtrips of SAW makes it possible to achieve highest sensitivity among SAW sensors. Moreover, it enables to use a very thin sensitive film, and consequently the shortest response time (2 s) was realized. In terms of the sensing range, it has the widest range of 10 ppm to 100% among any hydrogen sensors including FET or resistivity sensors. The response time was less than 1 s for 3.0% hydrogen concentration in nitrogen gas, evaluated by using a newly developed digital quadrature detector.

【 授权许可】

Unknown