Ultrasonic Spectroscopy of Silicon Single Crystal

Metrology and Measurement Systems

Petr Sedlak¹  Lech Hasse¹  Pavel Tofel¹  Jiri Majzner¹  Josef Sikula¹  Vlasta Sedlakova¹ 

关键词: non-destructive testing;    silicon single crystal;    electro-ultrasonic spectroscopy;    resonant ultrasonic spectroscopy;   

DOI  :  10.2478/v10178-011-0059-3

来源: Versita

【 摘 要 】

Specimens of Si single crystals with different crystal orientation [100] and [110] were studied by Electro-Ultrasonic Spectroscopy (EUS) and Resonant Ultrasonic Spectroscopy (RUS). A silicon single crystal is an anisotropic crystal, so its properties are different in different directions in the material relative to the crystal orientation. EUS is based on interaction of two signals: an electric AC signal and an ultrasonic signal, which are working on different frequencies. The ultrasonic wave affects the charge carriers' transport in the structures and the intermodulation electrical signal which is created due to the interaction between the ultrasonic wave and charge carriers, is proportional to the density of structural defects. RUS enables to measure natural frequencies of free elastic vibrations of a simply shaped specimen by scanning a selected frequency range including the appropriate resonances of the measured specimens.

【 授权许可】

Unknown