Synthesis of Ultrafine β-SiC Particles from SiOx (x = 0, 1, 2) Powders and C2H2

JOURNAL OF CHEMICAL ENGINEERING OF JAPAN

Tatsuya Okubo¹  Yu Bing Xu¹  Masayoshi Sadakata¹ 

[1] Department of Chemical System Engineering, University of Tokyo

关键词: Silicon Carbide;    Ultrafine Particle;    Thermodynamic Calculation;    Reaction System;    Selectivity;   

DOI  :  10.1252/jcej.30.662

来源: Maruzen Company Ltd

【 摘 要 】

References(22)Ultrafine (u.f.) silicon carbide (SiC) particles were synthesized from SiOx (x = 0, 1, 2) silicon (Si), silicon monoxide (SiO), or silica (SiO2)) powders (1.0–3.0 μm) and acetylene (C2H2) in an electric furnace operated under an argon (Ar) atmosphere. The particle products were analyzed by scanning electron microscopy, X-ray diffraction analysis and thermogravimetry-differential thermal analysis. The u.f. particles (25–35 nm) of cubic SiC (β-SiC) could be produced through Si + C2H2, SiO + C2H2 or SiO2 + C2H2 reaction. SiC selectivity was 43% for the Si/C2H2 System (C2H2/Si = 1.5), 79% for the SiO/C2H2 system (C2H2/SiO = 1.2), and 51% for the SiO2/C2H2 system (C2H2/SiO2 = 2.0). The tendency of the experimental results on SiC selectivity for the SiO/C2H2 system coincided with the theoretical curve based on thermodynamic equilibrium calculations.

【 授权许可】

Unknown