A Theoretical Study of the Temperature Field in a Pancake CVD Reactor

JOURNAL OF CHEMICAL ENGINEERING OF JAPAN

Takao Tsukada¹  Mitsunori Hozawa¹  Nobuyuki Imaishi² 

[1]Institute for Chemical Reaction Science, Tohoku University

[2]Institute of Advanced Material Study, Kyushu Universitv

关键词: Pancake CVD Reactor;    Temperature Field;    Global Analysis;    Finite Element Method;   

DOI  :  10.1252/jcej.25.692

来源: Maruzen Company Ltd

【 摘 要 】

References(9)Cited-By(2)For the pancake CVD reactor, a mathematical model for global analysis of beat transfer in the reactor was developed, and the effects of the geometry and location of the RF coil and the frequency of the RF current on the temperature distributions in the reactor, especially on the susceptor, were investigated.It is found that the heat generation rate in the susceptor is strongly affected by the location of the RF coil and the current frequency, and that the temperature variation on the susceptor is large with the plane RF coil. Also, by modifying the geometry of the RF coil, the temperature distributions on the susceptor can be easily improved.

【 授权许可】

Unknown