DESIGN OF CMOS READOUT FRONTEND CIRCUIT FOR MEMS CAPACITIVE MICROPHONES

Facta Universitatis, Series: Electronics and Energetics

Viera Stopjaková¹  Lukáš Nagy¹  Gabriel Nagy¹  Daniel Arbet¹  Martin Kováč¹ 

[1] Department of IC Design and TestSlovak University of TechnologyIlkovicova 3, 812 19 Bratislava$$

关键词: Ohmic contact;    specific contact resistance;    transfer length;    Transmission Line Model;   

DOI  :  

来源: University of Nis

【 摘 要 】

This paper deals with a frontend part of the readout circuit developed as an integrated circuit that after bonding together with a MEMS capacitive microphone (MCM) chip will be used in a noise dosimeter applicable in very noisy and harsh environment, e.g. mine. Therefore, the main attention has been paid to the high dynamic range, low offset and low noise of the developed readout interface as well as its low-power consumption feature. For conversion of the MCM’s capacitance variation into voltage, an approach based on the buffered input conversion stage biased by a voltage divider formed by diode-connected MOS transistors was used. The advantage of this approach is that the voltage divider formed by MOS transistors can be connected to the high-impedance node (output of the MCM). The whole frontend part of readout interface was designed in a standard 0.35 um CMOS technology. Finally, the achieved results are discussed and compared to other works.

【 授权许可】

Unknown