Parametric study of radiofrequency helium discharge under atmospheric pressure

Pramana

SHANAWER NIAZ¹  MANZOOR AHMAD BADAR¹  SAFDAR HUSSAIN1¹  HAFIZ IMRAN AHMAD QAZI¹ 

[1] Department of Physics, University of Sargodha, 40100 Sargodha, Pakistan$$

关键词: Atmospheric pressure glow discharge;    radiofrequency;    excitation temperature;    gas temperature.;   

DOI  :  

学科分类：物理（综合）

来源: Indian Academy of Sciences

【 摘 要 】

The parameters of radio frequency helium discharge under atmospheric pressure were studied by electrical and optical measurements using high voltage probe, current probe and optical emission spectroscopy. Two discharge modes $alpha$ and $gamma$ were observed within certain limits. During $alpha$ to $gamma$ mode transition, a decrease in voltage (280–168 V), current (2.05–1.61 A) and phase angle (76$^{m o}-56^{m o}$) occurred. The discharge parameters such as resistance, reactance, sheath thickness, electron density, excitation temperature and gas temperature were assessed by electrical measurements using equivalent circuit model and optical emission spectroscopy. In $alpha$ mode, the discharge current increased from 1.17 to 2.05 A, electron density increased from $0.19 imes 10^{12} {m to} 0.47 imes 10^{12} {m cm}^{−3}$ while sheath thickness decreased from 0.40 to 0.25 mm. The excitation temperatures in the $alpha$ and $gamma$ modes were 3266 and 4500 K respectively, evaluated by Boltzmann’s plot method. The estimated gas temperature increased from 335 K in the α mode to 485 K in the γ mode, suggesting that the radio frequency atmospheric pressure helium discharge can be used for surface treatment applications.

【 授权许可】

Unknown