Enhanced performance of a repetitively pulsed 130 mJ KrF laser with improved pre-ionization parameters

Pramana

N Varshnay¹  N S Benerji1¹  A Singh¹  Bijendra Singh¹ 

[1] Excimer Laser Section, Laser Material Processing Division, Raja Ramanna Centre for Advanced Technology, Indore 452 013, India$$

关键词: Excimer;    krypton fluoride;    pre-ionization;    spectral width;    beam profile.;   

DOI  :  

学科分类：物理（综合）

来源: Indian Academy of Sciences

【 摘 要 】

Studies related to the effect of pre-ionizer on laser output energy of a repetitively pulsed KrF laser are presented. The dependence of laser output energy, spectral width and beam spot homogeneity on pre-ionization parameters, namely its current and voltage rise time are reported here. Here, effectiveness of pre-ionization is optimized by improving pre-ionization current and rise time of the pump pulse of the automatic UV pre-ionizer KrF laser. It is observed that by increasing pre-ionization current from 6 kA to 10.6 kA, the output energy increases by about 30% (from 100 to 130 mJ). It is also observed that the emission spectral width reduces by almost 60% by increasing the pre-ionization current. Regular homogeneous and well-developed beam spot (nearly Hat-Top profile) was achieved under these optimized conditions.

【 授权许可】

Unknown