Thermal Effect on Characteristics of IZTO Thin Films Deposited by Pulsed DC Magnetron Sputtering

Bulletin of the Korean chemical society

Jin Hyo Boo¹  Sung Hoon Choa¹  Dong Geun Jung¹  Young Sung Kim¹  Don Jin Son¹  Yoon Duk Ko¹ 

关键词: TCO (transparent conducting oxide);    IZTO (indium zinc tin oxide);    Substrate temperature;    Pulsed dc magnetron sputter;   

DOI  :  

学科分类：化学（综合）

来源: Korean Chemical Society

【 摘 要 】

This study examined In-Zn-Sn-O (IZTO) films deposited on glass substrates by pulsed DC magnetron sputtering with various substrate temperatures. The structural, electrical, optical properties were analyzed. Xray diffraction showed that the IZTO films prepared at temperatures > 150 oC were crystalline which adversely affected the electrical properties. Amorphous IZTO films prepared at 100 oC showed the best properties, such as a low resistivity, high transmittance, figure of merit, and high work function of 4.07 ×10−4 Ω, 85%, 10.57 ×10−3 Ω−1, and 5.37 eV, respectively. This suggests that amorphous IZTO films deposited at relatively low substrate temperatures (100 oC) are suitable for electrode applications, such as OLEDs as a substitute for conventional crystallized ITO films.

【 授权许可】

Unknown