Optimization of AZO films prepared on flexible substrates

Bulletin of materials science

H H Huang¹  C C Hu³  C Y Hsu¹  J T Wang¹  C Y Chou¹  T W Lu² 

[1] Department of Mechanical Engineering, Lunghwa University of Science and Technology, Taoyuan, Taiwan$$Department of Mechanical Engineering, Lunghwa University of Science and Technology, Taoyuan, TaiwanDepartment of Mechanical Engineering, Lunghwa University of Science and Technology, Taoyuan, Taiwan$$;Institute of Biomedical Engineering, National Taiwan University, Taipei, Taiwan$$Department of Orthopaedic Surgery, School of Medicine, National Taiwan University, Taipei, Taiwan$$Institute of Biomedical Engineering, National Taiwan University, Taipei, TaiwanInstitute of Biomedical Engineering, National Taiwan University, Taipei, Taiwan$$Department of Orthopaedic Surgery, School of Medicine, National Taiwan University, Taipei, Taiwan$$Department of Orthopaedic Surgery, School of Medicine, National Taiwan University, Taipei, TaiwanInstitute of Biomedical Engineering, National Taiwan University, Taipei, Taiwan$$Department of Orthopaedic Surgery, School of Medicine, National Taiwan University, Taipei, Taiwan$$;Institute of Biomedical Engineering, National Taiwan University, Taipei, Taiwan$$Department of Mechanical Engineering, Ming Chi University of Technology, Taipei, Taiwan$$Institute of Biomedical Engineering, National Taiwan University, Taipei, TaiwanInstitute of Biomedical Engineering, National Taiwan University, Taipei, Taiwan$$Department of Mechanical Engineering, Ming Chi University of Technology, Taipei, Taiwan$$Department of Mechanical Engineering, Ming Chi University of Technology, Taipei, TaiwanInstitute of Biomedical Engineering, National Taiwan University, Taipei, Taiwan$$Department of Mechanical Engineering, Ming Chi University of Technology, Taipei, Taiwan$$

关键词: Flexible substrates;    Al2O3-doped zinc oxide;    magnetron sputtering;    grey relational analysis.;   

DOI  :  

学科分类：材料工程

来源: Indian Academy of Sciences

【 摘 要 】

Transparent conductive Al₂O₃-doped zinc oxide (in AZO, Al₂O₃ content is ∼ 2 wt%) thin films are deposited on flexible polyethylene terephthalate (PET) substrates, using radio frequency (rf) magnetron sputtering. The Taguchi method with an 𝐿₉ (3⁴) orthogonal array, a signal-to-noise ratio and analysis of variance (ANOVA) was used to determine the performance characteristics of the coating operations. Using grey relational analysis, the optimization of these deposition process parameters for AZO thin films with multiple characteristics was performed. The electrical resistivity of AZO/PET films is reduced from 2.6 Ã�? 10^-2 to 5.5 Ã�? 10^-3 ð›�?-cm and the visible range transmittance is > 83%, using the grey relational analysis. ANOVA results for the grey relational grade indicate that rf power and working pressure are the two most influential factors. The effect of the rf power (in the range from 30 to 70 W) and the argon working pressure (in the range from 0.90 to 1.1 Pa) on the morphology and optoelectronic performance of AZO films are also investigated. An analysis of the influence of the dominant parameters in the optimal design region is helpful for adjustment of the coating parameters.

【 授权许可】

Unknown