Surface texture modification of spin-coated SiO2 xerogel thin films by TMCS silylation

Bulletin of materials science

Bhavana N Joshi¹  Yogesh S Mhaisagar¹  A M Mahajan¹ 

[1] Department of Electronics, North Maharashtra University, Jalgaon 425 001, India$$Department of Electronics, North Maharashtra University, Jalgaon 425 001, IndiaDepartment of Electronics, North Maharashtra University, Jalgaon 425 001, India$$

关键词: Low-k;    TMCS;    surface modification;    hydrophobic;    contact angle.;   

DOI  :  

学科分类：材料工程

来源: Indian Academy of Sciences

【 摘 要 】

The SiO₂ xerogel thin films were deposited successfully by solâ€�?�gel technique via the acid-catalyzed hydrolysis and condensation of tetraethylorthosilicate (TEOS) with ethanol as a solvent. Further, the deposited thin films were treated wet chemically by trimethylchlorosilane (TMCS) and hexane solution with 10% and 15% volume ratio to remove the hydroxyl groups from the surface of deposited SiO₂ thin films. These as deposited and surfacemodified films were characterized by ellipsometer, Fourier transform infrared (FTIR) spectrometer and contact angle meter. The presence of 2900 and 850 cm^-1 peaks of CH₃ vibrations in FTIR spectra of surface-modified films confirms the hydrphobisation of SiO₂ surface. The maximum contact angle of 108.7° was observed for the surface-modified film at 10% TMCS.

【 授权许可】

Unknown