Structural and electrical properties of swift heavy ion beam irradiated Co/Si interface

Bulletin of materials science

D Kabiraj²  Ankur Jain¹  I P Jain¹  Shivani Agarwal¹  Garima Agarwal¹ 

[1] Materials Science Laboratory, Centre for Non-Conventional Energy Resources, University of Rajasthan, Jaipur 302 004, India$$Materials Science Laboratory, Centre for Non-Conventional Energy Resources, University of Rajasthan, Jaipur 302 004, IndiaMaterials Science Laboratory, Centre for Non-Conventional Energy Resources, University of Rajasthan, Jaipur 302 004, India$$;Nuclear Science Centre, Aruna Asaf Ali Marg, New Delhi 110 067, India$$Nuclear Science Centre, Aruna Asaf Ali Marg, New Delhi 110 067, IndiaNuclear Science Centre, Aruna Asaf Ali Marg, New Delhi 110 067, India$$

关键词: Swift heavy ion;    metal silicide;    interface;    GIXRD;    𝐼â€�?�ð�?��?? characteristics.;   

DOI  :  

学科分类：材料工程

来源: Indian Academy of Sciences

【 摘 要 】

Synthesis of swift heavy ion induced metal silicide is a new advancement in materials science research. We have investigated the mixing at Co/Si interface by swift heavy ion beam induced irradiation in the electronic stopping power regime. Irradiations were undertaken at room temperature using 120 MeV Au ions at the Co/Si interface for investigation of ion beam mixing at various doses: 8 Ã�? 10¹², 5 Ã�? 10¹³ and 1 Ã�? 10¹⁴ cm^-2. Formation of different phases of cobalt silicide is identified by the grazing incidence X-ray diffraction (GIXRD) technique, which shows enhancement of intermixing and silicide formation as a result of irradiation. 𝐼â€�?�ð�?��?? characteristics at Co/Si interface were undertaken to understand the irradiation effect on conduction mechanism at the interface.

【 授权许可】

Unknown