期刊论文详细信息
| Journal of the Korean Chemical Society | |
| Particle Size Analysis of Chemical Mechanical Polishing (CMP) Powder Using Sedimentation Field-Flow Fractionation (SdFFF) | |
| Seungho Lee1 Dong Young Kang1 Sun Tae Kim1 Sol Kim1 | |
| 关键词: Chemical Mechanical Polishing (CMP); Size distribution; Sedimentation field-flow fractionation (SdFFF); Transmission Electron Microscopy (TEM); Dynamic Light Scattering (DLS); | |
| DOI : | |
| 学科分类：化学（综合） | |
| 来源: Korean Chemical Society | |
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