Design of a Nano-Displacement No-Wiring Solid Actuator

Journal of Computational Science and Technology

Hiroyuki FUJITA¹  Junji SONE²  Laurent JALABERT³ 

[1] Institute of Industrial Science, The University of Tokyo;Tokyo Polytechnic University, Faculty of Engineering;LIMMS-CNRS/Institute of Industrial Science, The University of Tokyo

关键词: Nano Displacement;    Piezoelectric Actuator;    Structure Design;    Non-Wiring;   

DOI  :  10.1299/jcst.7.148

学科分类：地球科学(综合)

来源: Japan Academy

【 摘 要 】

References(11)In this paper, we considered a polymer-based piezoelectric stack actuator based on MEMS nano-positioning technology. A no-wiring structure was used for simplicity of fabrication and to avoid irregularity deformation under wiring. We selected the key parameters for actuation design, and a simulation was executed through FEM analysis of the electric field and deformation. From this simulation, we decided upon the appropriate parameters of the actuator.

【 授权许可】

Unknown