Nanoscale Pitch Standards SampleFabricated using Laser-Focused Atomic Deposition | Science Publications

American Journal of Nanotechnology

Baowu Zhang¹  Yili Xiao¹  Yan Ma¹  Wen Wu¹  Weigang Gong¹  Pingping Zhang¹  Tongbao Li¹  Yajun Zhao¹ 

关键词: Nanoscale pitch standard;    laser-focused atomic deposition;    laser cooling;    chromium atoms;    laser frequency;    atomic transtition frequency;    focal plane;    atomic resonant frequency;    atomic transition;    periodic structure;   

DOI  :  10.3844/ajnsp.2011.127.131

学科分类：材料工程

来源: Science Publications

【 摘 要 】

Problem statement: Nanotechnology is already a large sector of industry and science research and it is expected to continue to grow at very fast rate. The determination of absolute measurements of length at the nanometer scale and below is very difficult and expensive. So the nanoscale metrology standard is needed. Approach: The laser-focused atomic deposition is a new way to establish nanoscale pitch standards. When the atoms pass though laser standing wave field, the atoms will change the moving trajectory and be focused to the node (or antinode) of the laser standing wave according to the detuning of laser frequency and atomic resonant frequency. Because of the period of the laser standing wave, laser mask will form the anologue of an array of cylindrical lense. If a substrate is positioned at the focal plane of this lens array, a periodic structure is depositing onto the surface. The period of this structure is ?/2 of laser. Results: In this letter, a 425 nm laser light standing wave is used to focus a beam of chromium atoms to fabricate the nanoscale pitch standards sample of 213±0.1 nm. The height was 4 nm. The (FWHM) width of 64±6 nm. Conclusion/Recommendations: The period of this structure is ?2 of laser, whose spatial period can be traced directly to an atomic transtition frequency and the uncertainty possibility is 10^-5, which is fitted to be as the nanopitch standards"

【 授权许可】

Unknown