Deformable Membrane Mirror for Wavefront Correction (Short Communication)

Defence Science Journal

Ranvir Singh¹  Shailesh Kumar¹  V. K. Sarvanan¹  Monika Chaudhary¹  A. K. Meena¹  Amita Gupta¹ 

[1] Solid State Physics Laboratory, Delhi

关键词: Deformable membrane mirrors;    adaptive mirrors;    wavefront correction;    micromachined deformable mirrors;    microelectromechanical systems;    adaptive optical systems;   

DOI  :  

学科分类：社会科学、人文和艺术（综合）

来源: Defence Scientific Information & Documentation Centre

【 摘 要 】

Deformable or adaptive mirrors are used in modern adaptive optics systems for direct correction of the aberrations in the light wavefront. Conventional deformable mirrors used for this purpose are expensive electromechanical devices. Deformable membrane mirror fabricated using microelectromechanical systems (MEMS) technology is a low cost, compact adaptive optical element for correction of the lower-order optical aberrations such as defocus and astigmatism. In this paper, important aspects of device design and simulation, fabrication techniques, and test results are discussed.Defence Science Journal, 2009, 59(6), pp.590-594, DOI:http://dx.doi.org/10.14429/dsj.59.1563

【 授权许可】

Unknown