Ion Beam Based Techniques for Mercury Cadmium Telluride Infrared Detectors

Defence Science Journal

R. Pal¹  R. K. Sharma¹  P. K. Basu¹  Vandna Mittal¹ 

[1] Solid State Physics Laboratory, Delhi

关键词: Infrared detectors;    mercury-cadmium-telluride detectors;    ion implantation;    ion beam milling;    detector fabrications;    IR detectors;    reactive ion itching;    etching processes;   

DOI  :  

学科分类：社会科学、人文和艺术（综合）

来源: Defence Scientific Information & Documentation Centre

【 摘 要 】

The paper reviews the applications of ion beam-based techniques such as ion implantation and ion beam milling, for HgCdTe detector fabrication. Fabrication of large-format arrays and two-color arrays necessitate the use of dry processes. Ion irradiation causes type conversion in HgCdTe. The type conversion is far beyond the damage sites because of Hg in-diffusion to interstitial sites. The dry processes combine high anisotropy, faster etch rates, and better dimensional control, than wet etch processes, but require the damaged region to be removed. Defence Science Journal, 2009, 59(4), pp.395-400, DOI:http://dx.doi.org/10.14429/dsj.59.1539

【 授权许可】

Unknown