DLC Films Deposited by the DC PACVD Method

Acta Polytechnica

M. Zoriy¹  D. Palamarchuk¹  I. Hüttel¹  J. Gurovič¹  F. Černý¹  S. Konvičková¹ 

关键词: DLC;    PACVD;    microhardness;    adhesion;   

DOI  :  

来源: Czech Technical University in Prague, Faculty of M

【 摘 要 】

DLC (Diamond-Like Carbon) coatings have been suggested as protective surface layers against wear. However hard DLC coatings, especially those of greater thickness, have poor adhesion to substrates. We have used several ways to increase the adhesion of DLC coatings prepared by the PACVD (Plasma Assisted Chemical Vapour Deposition) method on steel substrates. One of these is the DC PACVD method for preparing DLC films.

【 授权许可】

Unknown