High-Q SWCPL for CMOS millimeter-wave technology

IEICE Electronics Express

K. Yoshida¹  R. Sapawi¹  R. K. Pokharel²  H. Kanaya¹  D. A. A. Mat¹ 

[1] Department of Electronics, Graduate School of ISEE, Kyushu University;EJUST Centre, Kyushu University

关键词: attenuation loss;    CPW;    pattern ground;    quality factor;    slow wave;   

DOI  :  10.1587/elex.9.1284

学科分类：电子、光学、磁材料

来源: Denshi Jouhou Tsuushin Gakkai

【 摘 要 】

References(7)Cited-By(1)In this paper, slow wave coplanar waveguide transmission line (SWCPL) is proposed on patterned ground shields in 0.18µm CMOS technology for low-loss passive devices, components and interconnects in millimeter wave region. Patterned grounds act to produce the slow-wave effect and they are usually kept below the metallization plane to reduce dielectric loss of the lossy silicon substrates. The measured attenuation loss and phase constant of the proposed CPW are 0.619dB/mm and 2.574rad/mm, respectively which result in the Quality factor (Q-factor) to be 18 at 54GHz.

【 授权许可】

Unknown