Self-assembly technique for MEMS vertical comb electrostatic actuator

IEICE Electronics Express

A. Moroswa¹  K. Isamoto¹  H. Toshiyoshi²  C. Chong¹  H. Fujita²  T. Makino¹ 

[1] Santec Corporation;Institute of Industrial Science, University of Tokyo

关键词: vertical comb;    process stiction;    self-assembly;    self alignment;   

DOI  :  10.1587/elex.2.311

学科分类：电子、光学、磁材料

来源: Denshi Jouhou Tsuushin Gakkai

【 摘 要 】

References(6)Cited-By(11)We report a very simple and reliable method for making Self-Assembled Vertical Comb (SAVC) drive actuators by using the standard SOI bulk micro-machining processes. The initial angular offset of the movable combs is prepared by using the process stiction which occurs during drying process after sacrificial release. The optical scanner integrated with SAVC has shown good electrostatic scanning performance of over 1.0-degree static-rotation angle with a typical drive voltage of 20V without any in-use electromechanical failure.

【 授权许可】

Unknown