Analysis of a Thermal Plasma Diamond CVD System

Acta Polytechnica

D. Kolman¹ 

关键词: modeling;    thermal plasma;    CVD;   

DOI  :  

来源: Czech Technical University in Prague, Faculty of M

【 摘 要 】

This paper deals with the analysis of a typical engineering system utilizing thermal plasma - a system for Diamond Chemical Vapor Deposition. It defines the system - a slightly overexpanded plasma jet impinging at a downstream -located substrate, outlines the theoretical description of the system - the Navier-Stokes and species conservation equations, and presents key theoretical results on the major and most troublesome factors influencing diamond deposition - velocity and temperature of the jet. Then, the paper demostrates the necessity to shift from a laminar to a turbulent flow description and compares both results to experiments. An explanation of the remaining discrepancy - insufficient velocity drop in the jet - is attempted.

【 授权许可】

Unknown