A low noise sigma-delta microaccelerometer interface circuit

IEICE Electronics Express

Honglin Xu¹  Liang Yin¹  Zhiqiang Gao¹  Mingyuan Ren¹  Xiaowei Liu¹ 

[1] MEMS center, Harbin Institute of Technology

关键词: sigma-delta;    microaccelerometer;    interface;    noise analysis;   

DOI  :  10.1587/elex.11.20140315

学科分类：电子、光学、磁材料

来源: Denshi Jouhou Tsuushin Gakkai

【 摘 要 】

References(10)Cited-By(4)A closed-loop sigma-delta (ΣΔ) capacitive microaccelerometer interface circuit is proposed in this work based on the time shared multiplexing electrostatic feedback and correlated-double-sampling (CDS) techniques. The noise analysis of the proposed low noise capacitance detection circuit is presented. The interface circuit is fabricated in a standard CMOS process and the active area is 13 mm2. The chip consumes 20 mW from a 5 V supply and the sampling frequency is 250 kHz. The measured results show that the sensor achieves a noise floor of 6 µg/Hz1/2 in a closed-loop operation over a 1.5 kHz bandwidth, and the achieved figure of merit (FOM, 53 pW/Hz) is better than the previously reported ΣΔ interfaces.

【 授权许可】

Unknown