Surface-normal electro-optic-polymer modulator with silicon subwavelength grating

IEICE Electronics Express

Toshiki Yamada¹  Yoshiaki Nakano²  Yuji Kosugi²  Akira Otomo¹  Takuo Tanemura² 

[1] National Institute of Information and Communications Technology;Department of Electrical Engineering and Information Systems, School of Engineering, The University of Tokyo

关键词: surface-normal modulator;    spatial light modulator;    electro-optic polymer;    high-contrast grating;   

DOI  :  10.1587/elex.13.20160595

学科分类：电子、光学、磁材料

来源: Denshi Jouhou Tsuushin Gakkai

【 摘 要 】

References(14)We propose novel silicon-based surface-normal optical modulator using electro-optic (EO) polymer. The EO polymer is embedded inside a thin silicon subwavelength grating layer, which is used as both the interdigitated electrodes for effective poling of the EO polymer, and as high-Q resonant structure for the incident light to enable efficient modulation. We numerically demonstrate 10-dB intensity modulation at 1550-nm wavelength under a refractive index change of only 3.8 × 10�?4, corresponding to the driving voltage below 1 V. Total-reflectance phase modulator is also demonstrated by adding a backside reflector. With inherently high-speed response over several tens of GHz, scalability to dense 2-D array integrated with CMOS driver circuitry, and relatively easy and low-cost fabrication without epitaxial process, the proposed device may find versatile applications in optical interconnects, free-space optical communications, imaging and sensing.

【 授权许可】

Unknown