Development of a vertical optical coupler using a slanted etching of InP/InGaAsP waveguide

IEICE Electronics Express

Masaru Zaitsu¹  Sunghan Choi¹  Akio Higo¹  Yoshiaki Nakano¹  Hiroshi Toshiyoshi¹  Masakazu Sugiyama²  Myung-Joon Kwack¹ 

[1] Research Center for Advanced Science and Technology (RCAST), The University of Tokyo;Department of Electrical Engineering and Information Systems, The University of Tokyo

关键词: slanted etching;    optical waveguide;    optical coupler;   

DOI  :  10.1587/elex.10.20130116

学科分类：电子、光学、磁材料

来源: Denshi Jouhou Tsuushin Gakkai

【 摘 要 】

References(7)Cited-By(1)We demonstrate a simple and efficient optical coupler for vertical coupling between optical fibers and InP-based waveguides using a slant-etched mirror. The angle of the etched mirror can be controlled by using an aluminum jig with a beveled surface inserted under the substrate during RIE (reactive ion etching) of InP/InGaAsP. The off-chip coupler is fabricated simultaneously with a high-mesa waveguide with only one etching process. Coupling loss of 7.3dB between the tapered single-mode fibers is obtained within the wavelength of 1530-1570nm.

【 授权许可】

Unknown