An equivalent-circuit model for MEMS electrostatic actuator using open-source software Qucs

IEICE Electronics Express

Hiroshi Toshiyoshi¹  Makoto Mita² 

[1] Institute of Industrial Science (IIS), The University of Tokyo;Institute of Space and Astronautical Science (ISAS), The Japan Aerospace Exploration Agency (JAXA)

关键词: MEMS;    micro actuator;    electrostatic;    simulation;    Qucs;   

DOI  :  10.1587/elex.6.256

学科分类：电子、光学、磁材料

来源: Denshi Jouhou Tsuushin Gakkai

【 摘 要 】

References(13)Cited-By(13)We report an equivalent circuit model for MEMS (microelectromechanical systems) electrostatic actuator using open-source circuit simulator Qucs (quite universal circuit simulator). Electrostatic force, equation of motion, and Kirchhoff's laws are implemented by using the EDD (equation defined device) function of Qucs. Mathematic integral operation in the equation of motion is interpreted into electrical circuits by using an ideal electrical capacitor that read input signal as current and returns accumulation result in terms of voltage. Seamless multi-physics mixed signal simulation between micro mechanics and electronics has become possible on the single platform of the circuit simulator.

【 授权许可】

Unknown