The Polishing of Cutting-Edge Polymer-on-Glass for Pigtailing Preparation | Science Publications

American Journal of Engineering and Applied Sciences

Noor A.A.M. Arif¹  Fazlinda A. Aziz¹  Saiful D. Zan¹  Mohammad S.A. Rahman¹  Seri M. Mustaza¹ 

关键词: Waveguides polishing;    SU-8 polymer;    silicon substrate;    rotation speed;    sandpaper;    length of cut;   

DOI  :  10.3844/ajeassp.2009.127.132

学科分类：工程和技术（综合）

来源: Science Publications

【 摘 要 】

Problem statement: The high quality of cutting-edge surface is important in optical waveguide's efficiency. The perfect polishing of end surface is significant to deliver the best quality of light waves and minimize the device losses such as insertion loss and return loss. Hence, this research is concern on the parameters in polishing SU-8 polymer to increase the efficiency of waveguide. The main research is to study on how polishing parameter affect the cut length of the end surface of SU-8 polymer on silicon and determining the best parameters for polishing SU-8 polymer. Approach: Seven sets of rotation velocities were chosen which were 50, 100, 150, 200, 250, 300 and 350 rpm for the first part. The graph of cut length versus velocity at different sand paper size was plotted based on the data obtained from this experiment. Equation for each graph was acquired to determine relationship between these two parameters. For the second part, four samples were used. Each sample was polished with same rotation time and sandpaper size prescribed but with different rotation speed. Rotation speed is selected between 200 to 350 rpm with rotation time of 15 min using sandpaper with size of 0.3

【 授权许可】

Unknown