Biomimetic acoustic sensor based on piezoelectric cantilever array

IEICE Electronics Express

Jun-Hyuk Kwak¹  Young Hwa Lee¹  Shin Hur¹  Youngdo Jung¹ 

[1] Korea Institute of Machinery and Materials

关键词: biomimetic;    piezoelectric;    cantilever array;    acoustic sensor;   

DOI  :  10.1587/elex.9.945

学科分类：电子、光学、磁材料

来源: Denshi Jouhou Tsuushin Gakkai

【 摘 要 】

References(6)Cited-By(1)In this research, a biomimetic acoustic sensor that can mimic the functional properties of basilar membrane in mammalian cochlea was fabricated with PMN-PT piezoelectric cantilever array. The piezoelectric cantilever array with ten different lengths was designed to obtain different resonant frequencies. It was fabricated by semiconductor processes and was poled to generate an electrical signal from an audible sound source. The fabricated acoustic sensor was tested by experimental setup. As an experimental result, the resonant frequencies of each cantilever and corresponding electrical signals were measured from 490Hz to 13,600Hz and the displacement sensitivity was measured with the audible frequency range.

【 授权许可】

Unknown