Improved phase-detection method using an air-coupled ultrasonic wave for a few-tens of nanometers displacement measurements

IEICE Electronics Express

Morimasa Nishihira¹  Katsuhiro Sasaki¹  Kazuhiko Imano¹ 

[1] Department of Electrical and Electronic Engineering, Faculty of Engineering and Resource Science, Akita University

关键词: air-coupled ultrasonic wave;    maximum phase-sensitivity;    multi-reference-wave;    phase-detection;    nanometer order;    displacement measurement;   

DOI  :  10.1587/elex.1.472

学科分类：电子、光学、磁材料

来源: Denshi Jouhou Tsuushin Gakkai

【 摘 要 】

References(5)Cited-By(2)To enhance the phase sensitivity of ultrasonic signals, phases of the multi-reference-wave are arranged around the maximum phase-sensitive region. The resolution of the phase detection is improved by magnifying the maximum sensitive phase detection outputs. A resolution of 40nm displacement (λ/200, 000) using 40kHz air-coupled ultrasonic waves has been achieved.

【 授权许可】

Unknown