Optical and capacitive characterization of MEMS magnetic resonator

IEICE Electronics Express

Almur A. S. Rabih¹  Mohd H. B. M. Khir¹  Muhammad U. Mian¹  John O. Dennis²  Tong Boon Tang¹  Mawahib G. A. Ahmed¹ 

[1] Department of Electrical and Electronic Engineering, Universiti Teknologi PETRONAS;Department of Fundamental and Applied Sciences, Universiti Teknologi PETRONAS

关键词: MEMS;    PolyMUMP;    Lorentz force;    capacitive;    displacement;    MS3110;   

DOI  :  10.1587/elex.13.20160773

学科分类：电子、光学、磁材料

来源: Denshi Jouhou Tsuushin Gakkai

【 摘 要 】

References(12)In this paper a Lorentz force driven Micro ELectro Mechanical Sytems (MEMS) resonator fabricated on PolyMUMP process with optical and capacitive sensing is presented. The resonator is designed by combining the two poly layers which result in an increase in the thickness of the resonator. Lorentz force generates lateral displacements at low driving voltages which are proportional to the magnetic field and the input current. A displacement of more than 9.8 µm was achieved with a magnetic field of 0.12 T and a driving current of 27 mA. Magnetic sensitivity of 1.41 V/T in air was experimentally measured using permanent magnets and capacitive sensing circuitry. Optical results demonstrate the sensitivity values between 0.090 µm/mT and 0.074 µm/mT.

【 授权许可】

Unknown