Compact beam deflector based on slow-light Bragg reflector waveguide monolithically integrated with VCSEL

IEICE Electronics Express

Fumio Koyama²  Akihiro Matsutani¹  Toshikazu Shimada² 

[1] Semiconductor and MEMS Processing Center, Technical Department, Tokyo Institute of Technology;Precision and Intelligence Laboratory, Tokyo Institute of Technology

关键词: VCSEL;    slow-light;    beam steering;    integration;   

DOI  :  10.1587/elex.10.20130842

学科分类：电子、光学、磁材料

来源: Denshi Jouhou Tsuushin Gakkai

【 摘 要 】

References(16)We demonstrate the monolithic integration of an electro-thermal beam deflector based on a slow-light Bragg reflector waveguide with a VCSEL for the first time. The slow-light mode is laterally exited from a VCSEL and is directly coupled to the slow-light waveguide. The chip size is smaller than 300μm. The fabrication process is the same as that of conventional VCSELs. Continuous electro-thermal beam steering of over 9° with a diffraction-limited divergence angle of 2.2° is obtained. In addition, a potential in compact and high-resolution on-chip beam deflectors is suggested.

【 授权许可】

Unknown