Response Characteristics of Silicon Microring Resonator Hydrogen Sensor

Proceedings

Matsuura, Sosuke¹  Yamasaku, Naoki²  Nishijima, Yoshiaki³ 

[1] Author to whom correspondence should be addressed.;Faculty of Engineering, Graduate School of Yokohama National University, 79-1 Tokiwadai, Hodogaya, Yokohama, Kanagawa 240-8501, Japan;Presented at the Eurosensors 2018 Conference, Graz, Austria, 9–12 September 2018

关键词: microring resonator;    silicon waveguide;    platinum-loaded tungsten oxide;    hydrogen sensor;    resonant wavelength;    gasochromic material;   

DOI  :  10.3390/proceedings2130795

学科分类：社会科学、人文和艺术（综合）

来源: mdpi

【 摘 要 】

A silicon microring-resonator (MRR) hydrogen sensor which utilizes platinum-loaded tungsten oxide (Pt/WO3) thin film was fabricated and evaluated. The uniform film was deposited on MRR portion by using sol-gel technique. By the exposure to pure hydrogen gas, the sensor devise showed the large resonant wavelength shift at room temperature. It is suggested that the change in the optical properties of hydrogen sensitive layer results in this response.

【 授权许可】

CC BY