A Double-Ended Tuning Fork Based Resonant Pressure Micro-Sensor Relying on Electrostatic Excitation and Piezoresistive Detection

Proceedings

Xie, Bo¹  Xiang, Chao²  Lu, Yulan³  Shi, Xiaoqing⁴ 

[1] Authors to whom correspondence should be addressed.;Presented at the Eurosensors 2018 Conference, Graz, Austria, 9–12 September 2018;School of Electronic, Electrical and Communication Engineering, University of Chinese Academy of Sciences, Beijing 100049, China;State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy of Sciences, Beijing 100190, China

关键词: double-ended tuning fork;    resonant pressure micro-sensor;    electrostatic excitation;    piezoresistive detection;    differential resonators;   

DOI  :  10.3390/proceedings2130875

学科分类：社会科学、人文和艺术（综合）

来源: mdpi

【 摘 要 】

This study proposes a microfabricated resonant pressure sensor based on electrostatic excitation and low-impedance piezoresistive detection in which a pair of double-ended tuning forks were utilized as resonators for differential outputs. In operations, targeted pressures deforms the pressure-sensitive membrane, resulting in stress variations of two resonators, leading to shifts of the intrinsic resonant frequencies, which were then measured piezoresistively. The developed microfabricated resonant pressure sensor was fabricated using simple SOI-MEMS processes and quantified in both open-loop and closed-loop manners, where the quality factor, differential sensitivity and linear correlation coefficient were quantified as higher than 10,000, 79.4 Hz/kPa and 0.99999, respectively. Compared to previous resonant piezoresistive sensors, the developed device leveraged single-crystal silicon as the piezoresistor, with advantages in simple sensing structures and fabrication steps. Furthermore, the differential setup was adopted in this study which can further improve the performances of the developed sensors.

【 授权许可】

CC BY