Nonlinear Analytical Model of Two Weakly Coupled MEMS Cantilevers for Mass Sensing Using Electrostatic Actuation

Proceedings

Walter, Vincent¹  Rabenimanana, Toky²  Kacem, Najib³ 

[1] Author to whom correspondence should be addressed.;Department of Applied Mechanics, CNRS/UFC/ENSMM/UTBM, FEMTO-ST Institute, University Bourgogne Franche-Comté, 25000 Besançon, France;Presented at the Eurosensors 2018 Conference, Graz, Austria, 9–12 September 2018

关键词: mode localization;    analytical model;    electrostatic nonlinearities;    mass sensor;   

DOI  :  10.3390/proceedings2131084

学科分类：社会科学、人文和艺术（综合）

来源: mdpi

【 摘 要 】

This paper presents a nonlinear analytical model of MEMS mass sensor, which is composed of two cantilevers of 98 µm and 100 µm length, 20 µm width and 1.3 µm thick. They are connected by a coupling beam and only the shortest cantilever is actuated by a combined AC-DC voltage. The DC voltage is used to equilibrate the system and the phenomenon of mode localization is investigated when a mass perturbation is applied. The sensor is modeled as a continuous system with beam theory and non-ideal boundary conditions are considered by using flexible supports. With a low AC voltage of 10 mV, a DC voltage of 5.85 V can counterbalance the length difference. This DC voltage decreases at 5.60 V when we increase the AC voltage, due to the effect of electrostatic nonlinearities. For a relative added mass of 0.1%, the amplitude change in the two cantilevers is more important when the coupling is weaker.

【 授权许可】

CC BY