Sensors for Thermal Characterization of Solid and Liquid Samples by 3-Omega Method

Proceedings

May, Daniel¹  Varpula, Aapo²  Ras, Mohamad Abo³  Grosse, Corinna⁴  Grigoras, Kestutis⁵ 

[1] Author to whom correspondence should be addressed.;Berliner Nanotest und Design GmbH, 12489 Berlin, Germany;Presented at the Eurosensors 2018 Conference, Graz, Austria, 9–12 September 2018;Technische Universität Chemnitz, 09111 Chemnitz, Germany;VTT Technical Research Centre of Finland Ltd., Espoo, P.O. Box 1000, 02044 VTT, Finland

关键词: thermal conductivity;    3-omega method;    porous silicon;    glass;    microfabrication;    atomic layer deposition;   

DOI  :  10.3390/proceedings2130883

学科分类：社会科学、人文和艺术（综合）

来源: mdpi

【 摘 要 】

Microchips have been designed and fabricated for the fast thermal characterization of samples by extension of the 3-omega method. Both solid and liquid samples can be measured by applying a small amount of material under investigation on the chip containing a micro heater/sensor. Two types of chips have been fabricated and tested: silicon chips with porous silicon (PS) layer as thermal isolator and glass chips with through glass vias (TGVs) for the back side contacting of the top side heater/sensor.

【 授权许可】

CC BY