Miniaturized Plasma Actuator Flow Measurements by MEMS-Based Thermal Conductivity Sensors

Proceedings

Tschurtschenthaler, Karl¹  Berndt, Dominik²  Lindner, Matthias³  Langer, Christoph⁴ 

[1] Author to whom correspondence should be addressed.;Faculty of General Sciences and Microsystems Technology, OTH Regensburg, 93047 Regensburg, Germany;Faculty of Mechanical Engineering, OTH Regensburg, 93047 Regensburg, Germany;Presented at the Eurosensors 2018 Conference, Graz, Austria, 9–12 September 2018

关键词: thermal conductivity sensors;    plasma actuators;    surface hotfilms;    sensors for aerospace;   

DOI  :  10.3390/proceedings2130939

学科分类：社会科学、人文和艺术（综合）

来源: mdpi

【 摘 要 】

The gasflow created by a minaturized dielectric barrier discharge (DBD) plasma actuator is measured by a MEMS-based thermal conductivity gas sensor giving an indication of flow velocity and flow direction. The possiblity of several sensors in a small area gives a far better accuracy of local flow phenomena compared to conventional sensors. This is important for a better understanding of plasma- induced flow characteristics.

【 授权许可】

CC BY