Fast Humidity Sensors for Harsh Environment

Proceedings

Bergmann, Alexander¹  Buchberger, Anton²  Coclite, Anna Maria³ 

[1] Author to whom correspondence should be addressed.;Institute of Electronic Sensor Systems, Graz University of Technology, 8010 Graz, Austria;Institute of Solid State Physics, Graz University of Technology, 8010 Graz, Austria

关键词: humidity measurement;    polymer;    hydrogel;    thin film;    initial chemical vapor deposition;    iCVD;    thin film thickness;    laser interference;    spectral reflectance;    Flory-Huggins theory;   

DOI  :  10.3390/proceedings2130988

学科分类：社会科学、人文和艺术（综合）

来源: mdpi

【 摘 要 】

With the application of a recently developed deposition method called initiated chemical vapor deposition (iCVD), remarkably fast responsive hydrogel thin films in the order of a few hundred nanometers were created. When in contact with humid air, the hydrogel layer extends its thickness manifold, which can be detected. The verification of the thickness change was realized interferometrically with a laser and a white light input source in two different implementations. The setup was designed without electric components in the vicinity of the active sensor layer and is therefore applicable in harsh and explosive environment. The achieved response time for an abrupt change of the humidity τ63 ≤ 2.5 s is about three times lower compared to one of the fastest commercially available sensors on the market.

【 授权许可】

CC BY