Vibration Mode Investigation of Piezoelectric Ultrasonic Microsensors on Buckled Diaphragms

Proceedings

Noda, Minoru¹  Yamashita, Kaoru²  Muralt, Paul³  Nishioka, Tomoki⁴ 

[1] Author to whom correspondence should be addressed.;Kyoto Institute of Technology, Kyoto 606-8585, Japan;Presented at the Eurosensors 2018 Conference, Graz, Austria, 9–12 September 2018.;Swiss Federal Institute of Technology in Lausanne (EPFL), Lausanne 1015, Switzerland

关键词: vibration mode;    diaphragm;    buckling;    ultrasonic sensor;    sensitivity;   

DOI  :  10.3390/proceedings2130835

学科分类：社会科学、人文和艺术（综合）

来源: mdpi

【 摘 要 】

Vibration mode of piezoelectric ultrasonic microsensors was investigated on buckled diaphragm structures from the viewpoint of higher order vibration modes than the fundamental one. Several vibration modes were generated on the diaphragms as the response to an ultrasound pulse, and their natural frequencies changed with increasing the buckling deflection in different rates. The natural frequencies of some modes approached each other, and the modes were accordingly superposed and degraded into a single mode in the large buckling ranges. The large buckling of the diaphragms consequently improves their vibration and thus the output waveforms.

【 授权许可】

CC BY