Cross-Sensitivity of an Optomechanical MEMS Transducer

Proceedings

Stifter, Michael¹  Steiner, Harald²  Kainz, Andreas³ 

[1] Author to whom correspondence should be addressed;Department for Integrated Sensor Systems, Danube University Krems, A-2700 Wr. Neustadt, Austria;Institute of Sensor and Actuator Systems, TU Wien, A-1040 Vienna, Austria

关键词: optomechanical;    MEMS;    cross-sensitivity;    transducer;   

DOI  :  10.3390/proceedings2130719

学科分类：社会科学、人文和艺术（综合）

来源: mdpi

【 摘 要 】

This work presents the investigation on a MEMS based optomechanical transducer for displacements or vibration regarding its cross-sensitivities to multidirectional input excitations. The principle of the optomechanical transducer is based on the modulation of the light flux passing through one static and one movable micromechanical aperture. This kind of transducer is of increasing interest for MEMS sensors since it has inherent benefits and can compete with state-ofthe- art readout concepts regarding its resolution. We have experimentally proven that the sensitivities of the device is 3.3 × 107 V/m in x-direction, 8.23 × 106 V/m in y-direction, while it is negligible in z-direction.

【 授权许可】

CC BY