Transfer Printing Technology for Fabricating Chemical Sensors Based on Tin Dioxide Nanowires

Proceedings

Wimmer-Teubenbacher, Robert¹  Sosada-Ludwikowska, Florentyna²  Köck, Anton³ 

[1] Author to whom correspondence should be addressed.;Microelectronics, Materials Center Leoben Forschung GmbH, 8700 Leoben, Austria;Presented at the Eurosensors 2018 Conference, Graz, Austria, 9–12 September 2018.

关键词: SnO;   

DOI  :  10.3390/proceedings2131076

学科分类：社会科学、人文和艺术（综合）

来源: mdpi

【 摘 要 】

Multi-nanowire based chemical gas sensors were produced employing a fast and simple transfer printing technology. SnO2 nanowires (NWs) were grown by a specific two-step technology including spray pyrolysis deposition and a thermal annealing process in presence of a Cu-catalyst. Subsequently the SnO2 NWs were print transferred by a polydimethylsiloxane (PDMS) stamp on Si-substrates with gold inter-digital electrode structures (IDES) creating a multi-NW chemical sensing device. The print-transfer technology enables a fast, easy and cheap fabrication of NW-based sensor devices with a good reproducibility. High sensitivity to H2S has been achieved, the performance results are presented in this work.

【 授权许可】

CC BY