期刊论文详细信息
Proceedings
Transfer Printing Technology for Fabricating Chemical Sensors Based on Tin Dioxide Nanowires
Wimmer-Teubenbacher, Robert1  Sosada-Ludwikowska, Florentyna2  Köck, Anton3 
[1] Author to whom correspondence should be addressed.;Microelectronics, Materials Center Leoben Forschung GmbH, 8700 Leoben, Austria;Presented at the Eurosensors 2018 Conference, Graz, Austria, 9–12 September 2018.
关键词: SnO;   
DOI  :  10.3390/proceedings2131076
学科分类:社会科学、人文和艺术(综合)
来源: mdpi
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【 摘 要 】

Multi-nanowire based chemical gas sensors were produced employing a fast and simple transfer printing technology. SnO2 nanowires (NWs) were grown by a specific two-step technology including spray pyrolysis deposition and a thermal annealing process in presence of a Cu-catalyst. Subsequently the SnO2 NWs were print transferred by a polydimethylsiloxane (PDMS) stamp on Si-substrates with gold inter-digital electrode structures (IDES) creating a multi-NW chemical sensing device. The print-transfer technology enables a fast, easy and cheap fabrication of NW-based sensor devices with a good reproducibility. High sensitivity to H2S has been achieved, the performance results are presented in this work.

【 授权许可】

CC BY   

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