A 3-Degree-of-Freedom MEMS Mirror with Controllable Static and Dynamic Motion for Beam Steering

Proceedings

Park, Byoungyoul¹  Afsharipour, Elnaz²  Soltanzadeh, Ramin³ 

[1] Author to whom correspondence should be addressed.;Department of Electrical and Computer Engineering, University of Manitoba, Winnipeg, MB R3T 2N2, Canada;Presented at the Eurosensors 2018 Conference, Graz, Austria, 9–12 September 2018

关键词: MEMS mirror;    Lorentz force actuation;    scanning micro-mirror;    3 degrees of freedom;   

DOI  :  10.3390/proceedings2130938

学科分类：社会科学、人文和艺术（综合）

来源: mdpi

【 摘 要 】

A 3 Degree-of-Freedom (DOF) MEMS mirror is presented which can direct the light beam on an objective point and also operate in a continuous resonance 2 DOF mode. The micro-mirror is actuated by Lorentz force and has 4 actuators embedded in 4 sides of a square mirror. By enabling the actuators, different types of tilting and linear motion can be achieved. The micro-mirror is able to work in either static mode by applying dc current or dynamic mode by applying an ac current at the mirror resonance frequency. The mirror showed a maximum tilt angle of 14.5° and 20° for an input rms power of 2 mW in the resonance mode. A linear motion of 200 µm was achieved by 65 mW of dc power.

【 授权许可】

CC BY