Phase-Shifting Shearing Interference Microscope with Savart Shear Prism and Rotatable Analyzer

Proceedings

Chen, Zhe-Wei¹  Lin, Shyh-Tsong²  Lin, Yu-Hsin³  Trịnh, HÆ°ng-Xuân⁴ 

[1] Author to whom correspondence should be addressed.;Department of Electro-optical Engineering, National Taipei University of Technology, 1, Sec. 3, Chung-Hsiao East Road, Taipei 10608, Taiwan;Presented at the 18th International Conference of experimental Mechanics (ICEM18), Brussels, Belgium, 1–5 July 2018.;Shuztung Machinery Industrial Co., Ltd., 30, Houke S. Rd., Houli Dist., Taichung City 42152, Taiwan

关键词: phase-shifting;    shearing interference microscope;    Savart shear prism;    rotatable analyzer;    contour height variation;    strain;   

DOI  :  10.3390/ICEM18-05483

学科分类：社会科学、人文和艺术（综合）

来源: mdpi

【 摘 要 】

A phase-shifting shearing interference microscope (PSSIM) is introduced in this paper. It is constructed by placing a Savart shear prism between the objective and sample of a polarizing microscope with a rotatable analyzer as the phase-shifter, and it is capable of determining contour height variation and deformation strain using the principle of shearing interferometry. This paper not only interprets the measurement theory but also presents an experimental setup of the PSSIM. Moreover, this paper exhibits the results from the uses of the setup; the results demonstrate the validity and applicability of the PSSIM.

【 授权许可】

CC BY